Excimer Laser - Ximer-300
Ultra-Robust 8.5 mJ Excimer Laser
- Compact modular construction with remote control
- Air cooled
- Short, high peak power pulses
- Variable output energy
- Long thyratron lifetime
Applications
- Photoablation and Micromachining
- Fiber Bragg grating writing
- Semiconductor processing
- Surface analysis
- Laser ionization mass spectroscopy
- Fluorescence spectroscopy
- Photochemistry
- Relaxation time studies
- Non-linear optics
|
F2 |
ArF |
KrF |
|
|
Wavelength |
|
|
|
|
Max. Pulse Energy2 |
1.3 |
7 |
8.5 |
|
Pulse Energy Adjustment Range |
50 to 100 |
50 to 100 |
30 to 100 |
% |
Max. Peak Power2 |
n.m. |
1.75 |
1.70 |
MW |
Max. Average Power 3 |
270 |
1400 |
2000 |
mW |
Max. Repetition Rate |
300 |
300 |
300 |
Hz |
Pulse Duration |
n.m. |
4 |
5 |
ns |
Pulse-to-pulse Stability |
3 |
3 |
3 |
% |
Beam Dimensions (V x H) |
2.1 x 2.3 |
3 x 3 |
4 x3 |
mm |
Beam Divergence (V x H) |
1.5 x 1.2 |
1.5 x 1.2 |
6.5 x 1.5 |
mrad |
|
1 For KrCl (222nm), XeCl (308nm), XeF (351nm) please call. 2 Measured at 25 Hz 3 Measured at 300 Hz |