燃烧流体测量设备分站

北京欧兰科技发展有限公司

 



Excimer Laser - Ximer-300

Ultra-Robust 8.5 mJ Excimer Laser

  • Compact modular construction with remote control
  • Air cooled
  • Short, high peak power pulses
  • Variable output energy
  • Long thyratron lifetime

Applications

  • Photoablation and Micromachining
  • Fiber Bragg grating writing
  • Semiconductor processing
  • Surface analysis
  • Laser ionization mass spectroscopy
  • Fluorescence spectroscopy
  • Photochemistry
  • Relaxation time studies
  • Non-linear optics

Laser Medium1

F2

ArF

KrF

Wavelength

157

193

248

nm

Max. Pulse Energy2

1.3
7
8.5

mJ

Pulse Energy Adjustment Range
50 to 100
50 to 100
30 to 100
%
Max. Peak Power2
n.m.
1.75
1.70
MW
Max. Average Power 3
270
1400
2000
mW
Max. Repetition Rate
300
300
300
Hz
Pulse Duration
n.m.
4
5
ns
Pulse-to-pulse Stability
3
3
3
%
Beam Dimensions (V x H)
2.1 x 2.3
3 x 3
4 x3
mm
Beam Divergence (V x H)
1.5 x 1.2
1.5 x 1.2
6.5 x 1.5
mrad

1 For KrCl (222nm), XeCl (308nm), XeF (351nm) please call.
2 Measured at 25 Hz
3 Measured at 300 Hz

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