Excimer Laser - ASX-750
High-Performance 350mJ Excimer
The ASX-750 is an afford  able, high-performance excimer laser designed for research and light industrial applications. It offers pulse energies up to 360 mJ and average powers to 20 W (KrF). Owing to an innovative pre-ionization scheme, the ASX-750 exhibits excellent beam uniformity, unsurpassed pulse-to-pulse stability (better than ± 2% for 100% of all pulses, even at repetition rates below 1 Hz) and timing jitter less than ± 2 ns.
- Soft, corona pre-ionization
- Efficient micro-particle filter
- Long thyratron life (>3 x 108 pulses)
- Pulse energies up to 360 mJ (at 248nm)
- Repetition rates up to 60Hz
- Excellent beam quality and pulse-to-pulse stability
- Easy installation and operation
- Easy and quick gas refilling
- Single-phase AC power
Applications
- Fiber Bragg grating writing
- Spectroscopy
- Photochemistry
- Dye laser pumping
- Materials processing investigations
| Laser Medium |
ArF |
KrF |
XeCl |
XeF |
units |
|
Wavelength |
193 |
248 |
308 |
351 |
nm |
|
Max. Pulse Energy1 |
220 |
360 |
270 |
140 |
mJ |
|
Max. Repetition Rate |
60 |
Hz |
|
Max. Average Power2 |
10 |
20 |
15 |
8 |
W |
|
Pulse-to-pulse Stability3 |
+ 3 |
+ 2 |
+ 2 |
+ 2 |
% |
1 Measured at 10 Hz
2 Measured at maximum repetition rate |
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