成像椭偏仪:
Ellipsometry is a very sensitive measurement technique that uses polarized light to characterize thin films, surfaces, and material microstructure. Usually the polarization of light changes upon reflection. These changes are measured by an ellipsometer and interpreted on the basis of model calculations. Ellipsometry can also be used to build a novel microscopy giving unique insights in the sample:
What information can be obtained?
· Layer Thickness with an accuracy of 0.1nm
· Optical constants of a substrate
· Orientation of molecules
· Mass coverages at surfaces
· Visualization of textures and morphology
The data accumulation is fast that you can follow in situ changes at interfaces such as corrosion, adsorption and so on. Ellipsometry is a versatile technology that has been used for over a century. The following guides you through some key concepts. | |
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