Product Description

The Nano-METZ is a compact z-axis nanopositioning system designed for high speed scanning and ultra-low noise characteristics for demanding AFM and metrology applications. The innovative design of the Nano- METZ coupled with our proprietary PicoQ^® sensor technology yields a resonant frequency of 14.5kHz and a noise floor of 400 femtometers/√Hz. The result: unparalled speed, response and precision for the most demanding and discerning metrology applications. Related products include the Nano-HS3M, Nano-MET2, Nano-MET3, Nano- MET10 and Nano-MET20 nanopositioning systems.

Technical Specifications
Range of motion	5 μm
Resolution	0.005 nm
Resonant Frequency	14.5 kHz
Recommended max. load (horizontal)*	0.1 kg
Recommended max. load (vertical)*	0.1 kg
Body Material	Aluminum or Titanium
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Position Noise Spectrum
The Nano-METZ demonstrates less than 400 femtometers of position noise. Click below to enlarge and view the data.

Step Response Time
The step response time (rise time) of a Nano-METZ performing a 0.5um step with no load is 0.25ms. Click below to enlarge and view the data.

Additional Information
Nano-METZ Drawing	Nano-METZ Catalog Pages

Product Description

Technical Specifications

Position Noise Spectrum

Step Response Time

Additional Information

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