燃烧流体测量设备分站

北京欧兰科技发展有限公司

 




Features
  • High speed
  • Low noise floor
  • Closed loop control
  • Picometer positioning resolution
  • High stability
  • Compact design


Typical Applications
  • High speed, high resolution positioning
  • Metrology
  • AFM
  • SPM



Product Description

The Nano-HS3M is a high speed, XYZ precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance.



Technical Specifications

Range of motion (XY) 10 μm
Range of motion (Z) 5 μm
Resolution
0.01 nm
Resonant Frequency (X) 1.6 kHz
Resonant Frequency (Y) 1.5 kHz
Resonant Frequency (Z) 13.5 kHz
Recommended max. load (horizontal)* 0.1 kg
Recommended max. load (vertical)* 0.1 kg
Body Material Aluminum or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Position Noise Spectrum

The Nano-HS3M demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis.



Additional Information

Nano-HS3M Drawing
Nano-HS3M Catalog Pages


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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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