Product Description

The Nano-HS3M is a high speed, XYZ precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQ^®technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance.

Technical Specifications
Range of motion (XY)	10 μm
Range of motion (Z)	5 μm
Resolution	0.01 nm
Resonant Frequency (X)	1.6 kHz
Resonant Frequency (Y)	1.5 kHz
Resonant Frequency (Z)	13.5 kHz
Recommended max. load (horizontal)*	0.1 kg
Recommended max. load (vertical)*	0.1 kg
Body Material	Aluminum or Titanium
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Position Noise Spectrum
The Nano-HS3M demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis.
X-Axis	Y-Axis	Z-Axis

Additional Information
Nano-HS3M Drawing	Nano-HS3M Catalog Pages

Product Description

Technical Specifications

Position Noise Spectrum

Additional Information

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