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Nanopositioning Systems

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  Single Axis Nanopositioners

Product Description Axes Applications
Nano-OP Series
Ranges of motion from 30 µm up to 100 µm and can be combined to provide multi-axis motion
1
AFM, NSOM, interferometry, optical fiber positioning
Nano-OPH Series Large central aperture, ranges of motion from 30 µm up to 100 µm
1
nanomanipulation, AFM, NSOM, specialized microscopy
Nano-MET10 & Nano-MET20
High speed, ultra-low noise system with ranges of motion 10 µm or 20 µm
1
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-HL Series Designed to carry loads up to 10kg with ranges of motion up to 200 µm
1
nanometer-scale positioning of heavy optics, nanomachining, industrial applications
Nano-Mini One of the smallest flexure guided nanopositioning stages available with 10 µm range of motion in a miniature footprint
1
interferometry, fiber alignment
Nano-P Series Precision linear translator in a small cylindrical configuration with 15 µm, 35 µm or 70 µm of motion
1
metrology, AFM, NSOM, SPM, nanoindenting
Nano-SPMZ Single axis micropositioning and high resolution nanopositioning in a compact unit
1
nanoindenting and nanomanipulation
Nano-LR200 200 µm of motion combined with exceptionally low out-of-plane motion for special applications
1
AFM, SPM, NSOM, wafer profilometry, optical alignment
Nano-YT500 Super long range (500 µm) system with a central aperture 1 optical inspection, long range applications

  Single Z Axis Nanopositioners

Product Description Axes Applications
Nano-Z Series 100 µm or 200 µm range of motion, large center aperture, and ultra-low profile 1(Z) high throughput fluorescence microscopy, super resolution microscopy
Nano-Z50HS High speed, low profile, with 50 µm range of motion and integrated sample holder 1(Z) high speed optical microscopy
Nano-ZL Series Super long range (500 µm or 100 µm), with aperture sized to hold multiwell plates 1(Z) high throughput fluorescence microscopy, super resolution microscopy
Nano-ZS Series 100 µm or 200 µm range of motion, large center aperture, and low profile 1(Z) super resolution (SR) microscopy, optical microscopy
Nano-CZ200 Compact, long range (200 µm) precision nanopositioning system 1(Z) metrology, high precision optical alignment and mirror positioning, scanning probe microscopy
Nano-CZ500 Compact, super long range (500 µm) precision nanopositioning system 1(Z) high resolution probe scanning, metrology, optical alignment and mirror positioning
Nano-METZ
High speed, ultra-low noise system with range of motion 5 µm
1
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-HSZ High speednanopositioner with picometer precision 1(Z) high speed AFM, NSOM, SPM, optical alignment and miror positioning
Nano-MZ Compact with 25 µm range of motion 1(Z) AFM, optical aligment, metrology

  Two Axis (X & Y) Nanopositioners

Product Description Axes Applications
Nano-PDQ Series
Extremely high speed nanopositioners with a 2.5 inch aperture and up to 75 µm of motion in XY 2 or 3 optical trapping, optical tweezers, high speed particle tracking
Nano-MET Series
High speed, ultra-low noise system with ranges of motion 75 µm (XY)
2 or 3
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-Bio Series Low profile system with 2.5 inch aperture for use with inverted optical microscopes, available with up to 300 µm travel range 2 optical microscopy, AFM scanning, super resolution (SR) microscopy
Nano-BioS Series Ultra low profile system with extra large aperture designed to be easily integrated into existing inverted microscopes, AFM's and other instrumentation, available with up to 300 µm travel range 2 STORM, PALM, confocal and fluorescence imaging, nanolithography, super resolution (SR) microscopy
Nano-H Series Compact stage with a 2 inch aperture 2 optical microscopy, AFM scanning, fluorescence imaging, optical tweezers
Nano-T Series Economical system with a 2.5 inch aperture and up to 200 µm 2 or 3 fluorescence imaging, super resolution (SR) microscopy, AFM scanning
Nano-Max50 Large load capacity, sub-nanometer precision scanner with 50 µm range of motion and a large aperture 2 quantum dot research, precision cryostat positioning
Nano-HS Series High speed nanopositioning system with picometer positioning resolution 2 or 3 high speed AFM, SPM, metrology
Nano-M250 Compact system constructed from titanium or invar with a 0.5 inch aperture 2 nanolithography, SEM, AFM
Nano-SPM200 Compact nanopositioning system with 200µm travel 2 AFM, NSOM, SPM, nanofabrication

  Three Axis (X Y & Z) Nanopositioners

Product Description Axes Applications
Nano-LPQ
Ultra-low profile, high speed nanopositioning system with 75 microns of travel in XY and 50 microns of travel in Z 3 optical trapping, optical tweezers, high speed particle tracking, NSOM, SPM
Nano-LP Series Low profile system with 2.5 inch aperture and up to 300 µm travel range 3 single molecule microscopy and spectroscopy, fluorescence imaging, super resolution (SR) microscopy
Nano-LPS Series Low profile system specifically designed for optical microscopy with an extra large aperture 3 STORM, PALM, confocal and fluorescence imaging, alignment, super resolution (SR) microscopy
Nano-PDQ Series Extremely high speed nanopositioners with a large center aperture, up to 75 µm of motion in XY, and 50 µm of motion in Z 2 or 3 optical trapping, optical tweezers, high speed particle tracking
Nano-MET Series
High speed, ultra-low noise system with ranges of motion 75 µm (XY) and 5 µm (Z)
2 or 3
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-T Series Economical system with XY motion up to 200 µm and Z-axis motion up to 50 µm 2 or 3 fluorescence imaging, super resolution (SR) microscopy, AFM scanning
Nano-3D200 Compact design with up to 200 µm travel, offered at a very competitive price 3 optical fiber alignment, nanomanipulation, nanofabrication
Nano-3D500 Super long range (500 µm) nanopositioning system with a compact design 3 micromachining, micromanipulation, optical fiber aligment
Nano-HS3M
High speed, ultra-low noise system with range of motion 10 µm (XY) and 5 µm (Z)
3
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-HS Series High speed system with picometer positioning resolution and 10 µm range of motion 2 or 3 high speed AFM, NSOM, SPM, optical alignment and miror positioning
Nano-M350 Compact, constructed from titanium and aluminum with a 0.25 inch aperture 3 nanolithography,SEM, MEMS testing, alignment

  Tip/Tilt and Rotational Nanopositioners

Product Description Axes Applications
Nano-MTA Series Mirror tip/tilt system with up to 5 milliradians travel for rapid scanning of laser beams with sub-microradian resolution 1 or 2 high speed laser beam steering, optical trapping, active optics
Nano-Theta
Rotational stage with sub-microradian resolution 1 laser beam scanning, lithography, FBG writing
Nano-Theta/H Rotational stage withs 5 milliradians of total motion and a large center aperture 1 polarized nanoscopy, FBG writing, lithography
Nano-Align3 Series 100 µm range of motion in the Z-axis and 2 mrad in θx and θy 3 microscopy, MEMS testing, wafer alignment and testing, nanomachining
Nano-Align5 Series 5-axis (X, Y, Z, θx, θy) nanopositioning system with a large center aperture 5 wafer alignment and testing, MEMS testing, optical aligment
Nano-Align6 Series 6-axis (X, Y, Z, θx , θy, θz) nanopositioning system with a large center aperture 6 optical aligment, wafer alignment, nano- and micromachining
Nano-M3Z 25 µm range of motion in the Z-axis and 1 mrad in θx and θy 3 optical aligment, metrology, nanolithography
Nano-Man5 50 µm range of motion in X and Y, 25 µm in Z, and 1 mrad in θx and θy 5 SEM, MEMS testing, nanolithography

  Integrated Nanopositioning and Micropositioning Stages

Product Description Axes Applications
Nano-View®/M Series Fully integrated nanopositioning and micropositioning systems for use with inverted optical microscopes that offer long range manual micropositioning in two axes, combined with a 2-axis or 3-axis nanopositioner 2 or 3 STORM, PALM, confocal and fluorescence imaging, single molecule microscopy and spectroscopy, particle tracking, optical trapping, optical tweezers. super resolution (SR) microscopy
Nano-View® Series
Fully integrated nanopositioning and micropositioning systems for use with inverted optical microscopes, combined with a high resolution, 2-axis or 3-axis nanopositioner 2 or 3 STORM, PALM, confocal and fluorescence imaging, single molecule microscopy and spectroscopy, particle tracking, optical trapping, optical tweezers, super resolution (SR) microscopy
MCL-MANNZ Integrated micro-nanopositioning system for use with inverted optical microscopes, combining a manual micrometer driven, two axis, linear motion stage with a high resolution z-axis nanopositioner. 1(Z) optical microscopy, confocal imaging, fluorescence imaging, single molecule spectroscopy, nanomanipulation, STORM and PALM imaging
MCL-MOTNZ Value priced positioning system for use with inverted optical microscopes, combining a stepper motor XY linear motion stage with a closed loop high resolution Z-axis nanopositioning system. 1(Z) optical microscopy, confocal imaging, fluorescence imaging, single molecule spectroscopy, nanomanipulation, STORM and PALM imaging
Nano-SPMZ Integrates single axis micropositioning and high resolution nanopositioning into a unit compatible with optical tables and standard mounting accessories 1 nanoindenting and nanomanipulation

  Products for Microscopy

Product Description Axes Applications
C-Focus™ System Focus stabilization system that eliminates microscope focus drift over long time periods 1 microscope focus correction, high speed confocal imaging
High Speed Lens Positioners Custom systems for high speed, single axis movement of lenses and optical components 1 high speed focus adjustment, high speed Z stack imaging
Nano-F Series Objective lens focusing elements with 100 µm or 200 µm of travel 1 STORM, PALM, confocal and fluorescence imaging, super resolution (SR) microscopy
Nano-F25HS High speed nanopositioner focusing element with 25 µm travel 1 high speed Z stack imaging, high speed focus adjustment
Nano-F450 Longest travel range piezo focusing element available for research microscopy with 450 µm travel 1 long range focus adjustment, long range Z stack imaging
Nano-F3D Objective lens nanopositioner with 3-axis (XYZ) motion up to 100 µm per axis 3 4Pi microscopy, custom scanning microscopy applications, optical inspection
Nano-Z Series 100 µm or 200 µm range of motion, large center aperture, and ultra-low profile 1(Z) high throughput fluorescence microscopy, super resolution microscopy
Nano-Z50HS High speed, low profile, with 50 µm range of motion and integrated sample holder 1(Z) high speed optical microscopy
Nano-ZL Series Super long range (500 µm), with aperture sized to hold multiwell plates 1(Z) high throughput fluorescence microscopy, super resolution microscopy
Nano-ZS Series 100 µm or 200 µm range of motion, large center aperture, and low profile 1(Z) super resolution (SR) microscopy, optical microscopy
Nano-LPQ
Ultra-low profile, high speed nanopositioning system with 75 microns of travel in XY and 50 microns in Z 3 optical trapping, optical tweezers, high speed particle tracking, NSOM, SPM
Nano-PDQ Series Extremely high speed nanopositioners with a large center aperture, up to 75 µm of motion in XY, and 50 µm of motion in Z 2 or 3 optical trapping, optical tweezers, high speed particle tracking
Nano-T Series Economical system with XY motion up to 200 µm and Z-axis motion up to 50 µm 2 or 3 fluorescence imaging, super resolution (SR) microscopy, AFM scanning
Nano-Bio Series Low profile, with large aperture for use with inverted optical microscopes, available in 50 µm, 100 µm, and 200 µm ranges of motion 2 optical microscopy, AFM scanning, super resolution (SR) microscopy
Nano-BioS Series Ultra low profile system designed to be easily integrated into existing inverted microscopes, AFM's and other instrumentation 2 STORM, PALM, confocal and fluorescence imaging, nanolithography, super resolution (SR) microscopy
Nano-LP Series Low profile with 100µm, 200 µm or 300 µm in X, Y and Z. 3 single molecule microscopy and spectroscopy, fluorescence imaging, super resolution (SR) microscopyy
Nano-LPS Series Low profile system specifically designed for optical microscopy with a large aperture (83mm) 3 STORM, PALM, confocal and fluorescence imaging, alignment, super resolution (SR) microscopy
Nano-View®/M Series Fully integrated nanopositioning and micropositioning systems for use with inverted optical microscopes that offer long range manual micropositioning in two axes, combined with a 2-axis or 3-axis nanopositioner 2 or 3 STORM, PALM, confocal and fluorescence imaging, single molecule microscopy and spectroscopy, particle tracking, optical trapping, optical tweezers, super resolution (SR) microscopy
Nano-View® Series
Fully integrated nanopositioning and micropositioning systems for use with inverted optical microscopes, combined with a high resolution, 2-axis or 3-axis nanopositioner 2 or 3 STORM, PALM, confocal and fluorescence imaging, single molecule microscopy and spectroscopy, particle tracking, optical trapping, optical tweezers, super resolution (SR) microscopy
MCL-MANNZ Integrated micro-nanopositioning system for use with inverted optical microscopes, combining a manual micrometer driven, two axis, linear motion stage with a high resolution z-axis nanopositioner. 1(Z) optical microscopy, confocal imaging, fluorescence imaging, single molecule spectroscopy, nanomanipulation, STORM and PALM imaging
MCL-MOTNZ Value priced positioning system for use with inverted optical microscopes, combining a stepper motor XY linear motion stage with a closed loop high resolution Z-axis nanopositioning system. 1(Z) optical microscopy, confocal imaging, fluorescence imaging, single molecule spectroscopy, nanomanipulation, STORM and PALM imaging

  Products for Metrology

Product Description Axes Applications
Nano-HS3M
High speed, ultra-low noise system with range of motion 10 µm (XY) and 5 µm (Z)
3
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-METZ
High speed, ultra-low noise system with range of motion 5 µm
1
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-MET Series
High speed, ultra-low noise system with ranges of motion 75 µm (XY) and 5 µm (Z)
2 or 3
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-MET10 & Nano-MET20
High speed, ultra-low noise system with ranges of motion 10 µm or 20 µm
1
high speed, high resolution positioning, Metrology, AFM, SPM
Nano-OP Series
High speed system with ranges of motion from 30 µm up to 100 µm, can be combined to provide multi-axis motion
1
AFM, NSOM, interferometry, optical fiber positioning
Nano-HS Series High speed system with picometer positioning resolution and 10 µm range of motion 2 or 3 high speed AFM, NSOM, SPM, optical alignment and miror positioning
Nano-SPM200 Compact nanopositioning system with 200 µm travel 2 AFM, NSOM, SPM, nanofabrication
Nano-SPMZ Integrates single axis micropositioning and high resolution nanopositioning into a unit compatible with optical tables and standard mounting accessories 1 nanoindenting and nanomanipulation
Nano-3D200 Compact design, 200 µm range, offered at a very competitive price 3 optical fiber alignment, nanomanipulation, nanofabrication
Nano-3D500 Super long range (500 µm) nanopositioning system with a compact design 3 micromachining, micromanipulation, optical fiber aligment

  Products for Active Optics

Product Description Axes Applications
Nano-MTA Series Mirror tip/tilt actuators for rapid scanning of laser beams with sub-microradian resolution 1 or 2 high speed laser beam steering, optical trapping, active optics
Nano-OP Series
Ranges of motion from 30 µm up to 100 µm and can be combined to provide multi-axis motion
1
AFM, NSOM, interferometry, optical fiber positioning
High Speed Lens Positioners Custom systems for high speed, single axis movement of lenses and optical components 1 high speed focus adjustment, high speed Z stack imaging
Nano-F Series Objective lens focusing elements with 100 µm or 200 µm of travel 1 STORM, PALM, confocal and fluorescence imaging, super resolution (SR) microscopy
Nano-F25HS High speed nanopositioner focusing element with 25 µm travel 1 high speed Z stack imaging, high speed focus adjustment
Nano-F450 Longest travel range piezo focusing element available for research microscopy with 450 µm travel 1 long range focus adjustment, long range Z stack imaging
C-Focus™ System Focus stabilization system that eliminates microscope focus drift over long time periods N/A microscope focus correction, high speed confocal imagingy
Nano-F3D Objective lens nanopositioner with 3-axis (XYZ) motion up to 100 µm per axis 3 4Pi microscopy, custom scanning microscopy applications, optical inspection
Nano-Theta
Rotational stage with sub-microradian resolution 1 laser beam scanning, lithography, FBG writing
Nano-Theta/H Rotational stage withs 5 milliradians of total motion and a large center aperture 1 polarized nanoscopy, FBG writing, lithography
Nano-3D200 Compact design, offered at a very competitive price 3 optical fiber alignment, nanomanipulation, nanofabrication
Nano-3D500 Super long range (500 µm) nanopositioning system with a compact design 3 micromachining, micromanipulation, optical fiber aligment

  Nanopositioners for UHV (bakeable) Applications

Nearly all standard systems can be modified for vacuum applications to 10-8 Torr if baking is not necessary. Many UHV applications require custom designed solutions. With experienced UHV instrumentation specialists on staff, we can provide custom nanopositioning solutions. For design guidance see our custom page or contact our vacuum specialists.


Product Description Axes Applications
Nano-UHV50
Ultra High Vacuum (UHV) compatible nanopositioner with 50 µm range of motion in X and Y, can be baked at temperatures up to 100° C 2 X-ray, VUV, and optical microscopy, UHV AFM, wafer testing
Nano-UHV100 Ultra High Vacuum (UHV) compatible nanopositioner with 100 µm range of motion in X and Y, can be baked at temperatures up to 100° C 2 X-ray, VUV, and optical microscopy, UHV AFM, wafer testing
Nano-UHV200 Ultra High Vacuum (UHV) compatible sub-nanometer precision scanner with 200 µm range of motion in X, Y and Z, can be baked at temperatures up to 100° C. 3 X-ray, VUV, and optical microscopy, UHV AFM, wafer testing
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