Product Description

The Nano-M350 is a compact three axis (X, Y, Z) nanopositioning system constructed from aluminum combined with titanium or constructed completely from invar for the highest degree of thermal stability. The compact design of the Nano-M350 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M350 is also available in high vacuum (non-bakeable) compatible models.

Technical Specifications
Range of motion (X)	50 μm
Range of motion (Y)	50 μm
Range of motion (Z)	25 μm
Resolution (25/50 μm)	0.05/0.1 nm
Resonant Frequency (X)	1 kHz ±20%
Resonant Frequency (Y)	700 Hz ±20%
Resonant Frequency (Z)	700 Hz ±20%
Stiffness	1.0 N/μm
θ _roll, θ _pitch (typical)	≤1 μrad
θ _yaw (typical)	≤3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Al and Titanium, or Invar
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-M350 Drawing	Nano-M350 Catalog Pages

Product Description

Technical Specifications

Additional Information

Related Products