Product Description

The Nano-HS Series is a high speed, multi-axis, precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano-HS can be configured to provide XY or XYZ motion. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications that require noise floors less than 10 picometers and/or high speed performance. The Nano-HS2 is an ideal high speed XY scanning stage for use with the MadPLL^® system. See the SPM-M Kit for an example of how to combine Mad City Labs equipment to build an AFM or NSOM.

Technical Specifications
Range of motion (XYZ)	10 μm
Resolution	0.01 nm
XY (HS2) Resonant Frequency	1.5 kHz ±20%
XY (HS3) Resonant Frequency	1.0 kHz ±20%
Z (HS3) Resonant Frequency	5.0 kHz ±20%
Scanning Speed	up to 300 Hz
Stiffness (Z-axis)	8 N/μm
Recommended max. load (horizontal)*	0.1 kg
Recommended max. load (vertical)*	0.1 kg
Body Material	Al, Invar or Titanium
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Position Noise Spectrum
The Nano-HS Series demonstrates less than 2 picometers of position noise. Click below to enlarge and view the data for all three axes.
X-Axis	Y-Axis	Z-Axis

Additional Information
Nano-HS2 Drawing Nano-HS3 Drawing	Nano-HS Series Catalog Pages

Product Description

Technical Specifications

Position Noise Spectrum

Additional Information

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