燃烧流体测量设备分站

北京欧兰科技发展有限公司

 




Features
  • Single axis (Z) motion
  • Long range motion - 500μm
  • Compact size
  • Closed loop control


Typical Applications
  • Precision optical alignment and mirror positioning
  • High resolution probe positioning
  • Metrology



Product Description

The Nano-CZ500 is a compact, long range, single axis (Z-axis) precision nanopositioning system. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with nanometer resolution under closed loop control. An optional center aperture up to 0.5 inches in diameter provides an optical pathway through the stage. The Nano-CZ500 can be operated in any orientation and is well suited for static alignment and moderate speed, long range scanning applications.



Technical Specifications

Range of motion (Z) 500 μm
Resolution
1.0 nm
Resonant Frequency 200 Hz ±20%
Stiffness 1.0 N/μm
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.1 kg
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Additional Information

Nano-CZ500 Drawing

Nano-CZ500 Series Catalog Pages


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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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