The Nano-MZ is a compact Z-axis nanopositioning system with a small center aperture designed to be easily integrated into existing instrumentation where space is restricted. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. A related model, the Nano-M3Z, includes additional “tip” and “tilt” motions (θX ,θY) to the linear motion in the Z-axis. The Nano-MZ can also be used as a “building block” with other systems to form complex nanopositioning assemblies with multi-axis motion - see the Nano-M350 and the Nano-Man5.
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