Product Description

The Nano-HSZ is a high speed single axis (Z-axis) precision nanopositioning system. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-HSZ offers a compact footprint, ultra low noise characteristics, and a resonant frequency greater than 7 kHz. These characteristics make it ideal for applications that require noise floors less than 10 picometers and/or high speed performance. With the step response time of the Nano-HSZ set to less than 1 millisecond for extremely high speed applications, scan frequencies up to 500Hz can be achieved.

Nano-HSZ Position Noise Spectrum

Technical Specifications
Range of motion (Z)	10 μm
Resolution	0.01 nm
Resonant Frequency	7.5 kHz ±20%
Scanning Speed (full amplitude)	up to 500 Hz
Stiffness	12 N/μm
Recommended max. load (horizontal)*	0.1 kg
Recommended max. load (vertical)*	0.1 kg
Body Material	Al, Invar or Titanium
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-HSZ Drawing	Nano-HSZ Catalog Pages

Product Description

Nano-HSZ Position Noise Spectrum

Technical Specifications

Additional Information

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