The UV- beam profiler consists of beamlux II advanced software, high resolution camera with industry standard and a UV converter tube.

An optional laser synchronisation device or trigger diode can be used for synchronization of laser and camera or single pulse evaluation.

Proper accessories enable to measure all excimer laser beams. Evaluation of the raw beam and profiles generated by homogenizers as top hat areas or laser lines are optimized.

The great field of application for our beam profiler is quality control in industry and laser improvement in R&D. It is an approved tool in semi conductor industry to control raw beam and beam quality in the processing plane • improve efficiency and your productivity

Features

• Measures all excimer laser

• Online quality control

• real time evaluation of the laser with 1/10th of a second

• Synchronizes up to three cameras simultaneously for measurement of raw beam and processing plane

• TCP/IP remote control to control your laser system from your desk

Camera System

• High dynamic range camera
• High resolution UV converter
• Homogeneity up to > 98 % over active area
• Short decay time
• Damage threshold up to 15 J/cm²
• Optional Single pulse detection up to 1 kHz (limited by the converter decay time)