Product Description

The Nano-Align5 is a five axis (X, Y, Z, θ_X , θ_Y) nanopositioning system with a large center aperture. The Nano-Align5 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with “tip” and “tilt” (θ_Xθ_Y). The large center aperture provides excellent access for microscopy optics, sample Nano-Align5 constructed from aluminum. holders, and probe placement. The Nano-Align5 includes internal sensors with proprietary PicoQ^® technology for absolute position measurement and picometer/ nanoradian accuracy under closed loop control. The Nano-Align5 can be combined with the MicroStage and Manual MicroStage for long range micropositioning.

Technical Specifications
Ranges of motion (Nano-Align5-100)	100 x 100 x 100 μm x 1.1 mrad (θ_X) x 1.5 mrad (θ_Y)
Ranges of motion (Nano-Align5-200)	200 x 200 x 200 μm x 2.3 mrad (θ_X) x 3.0 mrad (θ_Y)
Ranges of motion (Nano-Align5-300)	300 x 300 x 300 μm x 3.3 mrad (θ_X) x 4.5 mrad (θ_Y)
Resolution (Nano-Align5-100)	0.2 nm (XYZ), 2.2 nrad (θ_X), 3.0 nrad (θ_Y)
Resolution (Nano-Align5-200)	0.4 nm (XYZ), 4.6 nrad (θ_X), 6.0 nrad (θ_Y)
Resolution (Nano-Align5-300)	0.6 nm (XYZ), 6.6 nrad (θ_X), 9.0 nrad (θ_Y)
Resonant Frequencies
X axis (100/200/300 μm)	450/400/350 Hz ±20%
Y axis (100/200/300 μm)	350/300/250 Hz ±20%
Z axis (100/200/300 μm)	450/350/250 Hz ±20%
Stiffness	1.0 N/μm
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Aluminum (all models), Invar or Titanium (100 or 200μm only)
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-Align5 Series Drawing	Nano-Align5 Series Catalog Pages

Product Description

Technical Specifications

Additional Information

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