波导模分析模块:
Waveguide modes are the technique of choice for the characterization of films with a thickness greater than 500 nm. A very high precision in the layer characterization is achieved that cannot be matched by any other technique! In particular, waveguide modes are ideally suited for anisotropic samples. Measurements with different polarizations specifically question selected element of the anisotropic refractive index and the combined data lead to their independent determination. This is a major difference to ellipsometric measurements. Here, all refractive index elements contribute simultaneously. As a consequence, the data analysis is complex and bears an inherent ambiguity.
Waveguide modes are in a way related to surface plasmons and can only be excited in very special arrangements. The following section guides you through the basic concepts. | |
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