Single Axis Motion

Nano-Mini - A single axis nanopositioner with 10 µm range of motion in a miniature footprint (1.5" X 1"). The Nano-Mini is one of the smallest flexure guided nanopositioning stages available.
Nano-P Series - Precision linear translators in a small cylindrical configuration. Available with 15 µm, 35 µm or 70 µm of motion.
Nano-OP Series - This single axis series of nanopositioners can provide ranges of motion from 30 µm up to 100 µm with sub-nanometer resolution. The Nano-OP Series is extremely useful for AFM, NSOM, interferometry, optical fiber positioning and applications that require a very stiff, high speed linear actuator. Multiple Nano-OP’s can be combined to provide multi-axis motion.
Nano-LR200 - A long range nanopositioner with 200 µm of motion combined with exceptionally low out-of-plane motion for special applications.

Single Z-Axis Motion

Nano-HSZ - The Nano-HSZ is a compact, extremely high speed, single axis (Z-axis) precision nanopositioning system with sub-nanometer accuracy under closed loop control. Range of motion is 10 µm.
Nano-MZ - Compact Z-axis nanopositioner with 25 µm range of motion. An axial aperture makes it ideal for SEM nanopositioning applications.
Nano-Z Series - Z-axis nanopositioners having 100 µm or 200 µm range of motion combined with a large center aperture and low profile, making them ideal for microscopy applications.
Nano-Z500 - Super long range (500 µm) Z-axis nanopositioner with aperture sized to hold multiwell plates.

X / Y Axis Motion

Nano-M250 - The Nano-M250 is a compact, 2-axis nanopositioning system constructed from titanium or invar. The compact design, and 0.5 inch aperture makes it ideal for applications in nanolithography and SEM.
Nano-Max50 - Large load capacity, sub-nanometer precision scanner with 50 µm range of motion in two axes (XY). A large aperture is provided for optical or instrumentation feed through.
Nano-H Series - The Nano-H series is a compact, long range, 2-axis nanopositioning stage with a large aperture.
Nano-Bio Series - A 2-axis (XY), low profile nanopositioning system with a large aperture for use with inverted optical microscopes. Available in 50 µm, 100 µm, and 200 µm ranges of motion.
Nano-PDQ Series - Extremely high speed 2 or 3-axis nanopositioners with a large center aperture. Available with up to 75 µm of motion in XY, and 50 µm of motion in Z.
Nano-T Series - The economical Nano-T Series is comprised of multi-axis nanopositioning systems with sub-nanometer resolution.

X / Y / Z Axis Motion

Nano-M350 - The Nano-M350 is a compact, 3-axis nanopositioning system constructed from titanium and aluminum. The compact design, and 0.25 inch aperture makes it ideal for applications in nanolithography and SEM.
Nano-PDQ Series - Extremely high speed 2 or 3-axis nanopositioners with a large center aperture. Available with up to 75 µm of motion in XY, and 50 µm of motion in Z.
Nano-T Series - The economical Nano-T Series has sub-nanometer resolution and either two or three axes of motion. XY motion up to 200 µm and Z-axis motion up to 50 µm is available.
Nano-LP Series - The lowest profile 3-axis nanopositioning system available offering 100µm or 200 µm in X, Y and Z. Ideally suited for optical microscopy.

Z / θ_X / θ_Y Axis Motion

Nano-M3Z - The Nano-M3Z is a 3-axis nanopositioning system with 25 µm range of motion in the Z-axis and 1 mrad in θ_X and θ_Y.
Nano-Align3 Series - The Nano-Align3 is a 3-axis nanopositioning system with 100 µm range of motion in the Z-axis and 2 mrad in θ_X and θ_Y.

X / Y / Z / θ_X / θ_YAxis Motion

Nano-Man5 - The Nano-Man5 is a 5-axis nanopositioning system with 50 µm range of motion in X and Y, 25 µm in Z, and 1 mrad in θ_X and θ_Y.
Nano-Align Series - The Nano-Align is a long range 5-axis nanopositioning system with 100 µm or 200 µm range of motion in X, Y and Z with up to 2.3 mrad in θ_X and θ_Y.

Nanometer Measuring

Nano-Gauge Series - An ultra high precision, single axis, displacement measuring instrument.

Micropositioning Stages

MicroStage Series - The MicroStage is a precision stepper motor driven micropositioner for use with inverted optical microscopes. Integrated linear encoders provide high resolution position measurement.
Manual MicroStage Series - The Manual MicroStage is a low profile, two-axis microscopy stage specifically designed to act as a secure base for high resolution nanopositioning stages. Manual micrometers allow up to 25mm of motion with 1µm vernier scales. Internal preloads continuously lock the stage position to resist acceleration forces from attached nanopositioners.

Integrated Nano/Micropositioning Stages

Nano-View™ Series - The Nano-View™ is a fully integrated nanopositioning system for use with inverted optical microscopes that offers long range micropositioning in two axes, combined with a high resolution, 2-axis or 3-axis nanopositioner.
Nano-View™/M Series - The Nano-View™/M system integrates manual micrometer 2-axis coarse positioning with a high resolution 2-axis or 3-axis nanopositioner.

Microscopy Applications

Nano-Z Series - Z-axis nanopositioners having 100 µm or 200 µm range of motion combined with a large center aperture and low profile, making them ideal for microscopy applications.
Nano-Z500 - Super long range (500 µm) Z-axis nanopositioner with aperture sized to hold multiwell plates.
Nano-Bio Series - A 2-axis (XY), low profile nanopositioning system with a large aperture for use with inverted optical microscopes. Available in 50 µm, 100 µm, and 200 µm ranges of motion.
Nano-PDQ Series - Extremely high speed 2 or 3-axis nanopositioners with a large center aperture. Available with up to 75 µm of motion in XY, and 50 µm of motion in Z.
Nano-LP Series - The lowest profile 3-axis nanopositioning system available offering 100µm or 200 µm ranges of motion in X, Y and Z .
MicroStage Series - The MicroStage is a precision stepper motor driven micropositioner for use with inverted optical microscopes. Integrated linear encoders provide high resolution position measurement.
Manual MicroStage Series - The Manual MicroStage is a low profile, two-axis microscopy stage specifically designed to act as a secure base for high resolution nanopositioning stages. Manual micrometers allow up to 25mm of motion with 1µm vernier scales. Internal preloads continuously lock the stage position to resist acceleration forces from attached nanopositioners.
Nano-View™ Series - The Nano-View™ is a fully integrated nanopositioning system for use with inverted optical microscopes that offers long range micropositioning in two axes, combined with a high resolution, 2-axis or 3-axis nanopositioner.
Nano-View™/M Series - The Nano-View™/M system integrates manual micrometer 2-axis coarse positioning with a high resolution 2-axis or 3-axis nanopositioner.

Active Optics Applications

High Speed Lens Positioners - Custom systems for high speed, single axis movement of lenses and optical components.
Nano-F Series - The Nano-F Series objective lens focusing elements are specialized microscopy nanopositioners with 100 µm or 200 µm of travel and sub-nanometer resolution.
Nano-MTA Series - The Nano-MTA Series are mirror tip/tilt actuators for rapid scanning of laser beams with sub-microradian resolution. Single axis and two axis systems are available. Full amplitude scans at speeds up to 400 Hz are possible.
Nano-Theta - Nanopositioning rotational stage for wafer mask and optical alignment with sub-microradian resolution.

UHV (bakeable) Applications

Note: Nearly all standard systems can be modified for vacuum applications to 10^-8 Torr if baking is not necessary.

Nano-UHV50 - An Ultra High Vacuum (UHV) compatible nanopositioner with 50 µm range of motion in X and Y. Can be baked at temperatures up to 120° C
Nano-UHV100 - An Ultra High Vacuum (UHV) compatible nanopositioner with 100 µm range of motion in X and Y. Can be baked at temperatures up to 120° C.
Nano-UHV200 - An Ultra High Vacuum (UHV) compatible sub-nanometer precision scanner with 200 µm range of motion in X, Y and Z. Can be baked at temperatures up to 100° C.

Nanopositioner Controllers

Nano-Drive™ Series - Complete electronic controllers for sub-nanometer positioning. Includes low noise, low drift amplifiers, absolute position control, bandwidth selection and closed loop feedback with proportional-integral control. Available with analog and digital (USB) position input control and real-time position measurement.

Custom Nanopositioners

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