Product Description

The Nano-T Series are economical, multi-axis nanopositioning systems which are available in a variety of configurations. The Nano-T Series have up to 200 microns range of motion in X and Y, and up to 50 microns in Z. The large center aperture accomodates lenses and probes without compromising performance. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement and picometer accuracy under closed loop control. The Nano-T Series is well suited to applications in which precise positioning is required but the overall stage height is not critical. If extremely low profile systems are required, both the Nano-Bio2 and the Nano-LP Series should be considered.

Compatible Software Packages:

Technical Specifications
Range of motion (X, Y)	100 μm/200 μm
Range of motion (Z)	20 μm/50 μm
Resolution XY (100/200 μm)	0.2/0.4 nm
Resolution Z (20/50 μm)	0.04/0.1 nm
Resonant Frequencies
X axis (100/200 μm)	450/400 Hz ±20%
Y axis (100/200 μm)	250/200 Hz ±20%
Z axis (20/50 μm)	450/350 Hz ±20%
Stiffness	1.0 N/μm
θ _roll, θ _pitch (typical)	≤1 μrad
θ _yaw (typical)	≤3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Al or Invar
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-T Series (2 Axis) Drawing Nano-T Series (3 Axis) Drawing	Nano-T Series Catalog Pages

Product Description

Technical Specifications

Additional Information

Related Products