Product Description

The Nano-UHV200 is a three axis UHV compatible nanopositioning system constructed from titanium and 316 stainless steel. Made entirely from non-magnetic UHV compatible materials, the Nano-UHV200 is bakeable to 100°C for vacuum applications in the 10-10 Torr range. A 2 inch x 2 inch center aperture provides an optical pathway or access for sample holders. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.

Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.

Technical Specifications
Range of motion (X)	200 μm
Range of motion (Y)	200 μm
Range of motion (Z)	200 μm
Resolution (XYZ)	0.4 nm
Resonant Frequency (X)	300 Hz ±20%
Resonant Frequency (Y)	150 Hz ±20%
Resonant Frequency (Z)	175 Hz ±20%
Stiffness	2 N/μm
θ _roll, θ _pitch (typical)	≤1 μrad
θ _yaw (typical)	≤3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Titanium and 316 SS
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Additional Information
Nano-UHV200 Drawing	Nano-UHV200 Catalog Pages

Product Description

Technical Specifications

Additional Information

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