Product Description

The Nano-MET2 and Nano-MET3 are ultra-low noise, high precision nanopositioning systems with picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ^® technology provide absolute, repeatable position measurement under closed loop control. The ultra-low position noise (4 picometers/Hz in XY and 400 femtometers/√Hz in Z) of these nanopositioning systems make them ideal for demanding metrology applications. With a resonant frequency of 13.5kHz, the z-axis of the Nano-MET3 offers ultra-fast response needed for demanding AFM applications. Related products include the Nano-METZ, Nano-MET10 and Nano-MET20 nanopositioning systems.

Technical Specifications
Range of motion (XY)	75 μm
Range of motion (Z)	5 μm
Resolution (XY)	0.15 nm
Resolution (Z)	0.005 nm
Resonant Frequency (XY, Nano-MET2)	1.4 kHz
Resonant Frequency (XY, Nano-MET3))	1.0 kHz
Resonant Frequency (Z, Nano-MET3)	13.5 kHz
Recommended max. load (horizontal)*	100 g
Recommended max. load (vertical)*	100g
Body Material	Aluminum
Controller	Nano-Drive^®
* Larger load requirements should be discussed with our engineering staff.

Position Noise Spectrum
The Nano-MET Series demonstrates less than 4 picometers of position noise on X and Y and less than 400 femtometers of position noise on Z. Click below to enlarge and view the data for each axis.
X-Axis	Y-Axis	Z-Axis

Additional Information
Nano-MET2 Drawing (2 Axis) Nano-MET3 Drawing (3 Axis)	Nano-MET Series Catalog Pages

Product Description

Technical Specifications

Position Noise Spectrum

Additional Information

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