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Features
- Compact tubular design
- True flexure guided motion
- Position sensors, closed loop control
- Up to 70 μm motion
- Invar and titanium construction
- Closed loop control
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Typical Applications
- Single axis positioning
- Surface analysis
- Metrology
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Product Description |
The Nano-P Series are piezo actuated, closed loop, linear translators that incorporate a unique flexure hinge design. The flexure hinge is machined entirely from a single block of high strength titanium using an advanced electrical discharge machining process. This hinge, available for the first time on a tubular nanopositioner, ensures the highest degree of repeatability and load capability. Unlike similar looking products on the market, the Nano-P Series does not have internal Belleville springs. Belleville springs are not frictionless and therefore cannot provide the high degree of repeatability of a true nanopositioner. The guiding mechanism of the Nano-P Series is a true flexure spring - eliminating mechanical friction and stiction. The Nano-P Series is constructed from invar and titanium for the best combination of thermal stability and mechanical strength, making it ideal for the most demanding positioning and metrology applications. The Nano-P Series is available in three standard ranges of motion with integrated position sensors utilizing proprietary PicoQ™ technology to provide absolute, repeatable position measurement with picometer accuracy under closed loop control. Custom systems available.
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Noise Plots - Nano-P15 |
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Test Data - Nano-P35 |
The Nano-P35 closed-loop response to a 3nm peak-to-peak square wave input signal, measured with USB digital interface. Notice the ultra-low, sub-nanometer stability of the system over the time scale. Similar products offered by other companies are unable to achieve such low-noise results. The Nano-P uses a true flexure guiding mechanism and low-noise sensors to achieve high-resolution positioning. |
Technical Specifications |
| Range of motion (Nano-P15) |
15 μm |
Range of motion (Nano-P35)
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35 μm |
| Range of motion (Nano-P70) |
70 μm |
| Resolution (15/35/70 μm) |
0.03/0.07/0.14 nm |
| Resonant Frequency |
2.5 kHz ±20% |
| Recommended max. load* |
0.2 kg |
| Body Material |
Invar and Titanium |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
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phone: 608.298.0855 fax: 608.298.9525
Copyright © 2013 | | |
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